Handbook of Optical Systems [Vol 2 - Physical Image Formation] -.pdf
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1、Handbook of Optical SystemsEdited byHerbert GrossVolume 2:Physical Image FormationWolfgang Singer,Michael Totzeck,Herbert GrossHandbook of Optical SystemsEdited by Herbert GrossVolume 2:Physical Image FormationHandbook of Optical SystemsEdited byHerbert GrossVolume 1:Fundamentals of Technical Optics
2、Volume 2:Physical Image FormationVolume 3:Aberration Theory and Correction of Optical SystemsVolume 4:Survey of Optical InstrumentsVolume 5:Metrology of Optical Components and SystemsVolume 6:Advanced Physical OpticsHandbook of Optical SystemsEdited byHerbert GrossVolume 2:Physical Image FormationWo
3、lfgang Singer,Michael Totzeck,Herbert GrossHerbert GrossHead of Optical Design DepartmentCarl Zeiss AG,Oberkochen,Germanye-mail:Grosszeiss.deWolfgang SingerDepartment LIT-TDCarl Zeiss SMTAG,Oberkochen,Germanye-mail:singerzeiss.deMichael TotzeckDepartment LIT-TDCarl Zeiss SMTAG,Oberkochen,Germanye-ma
4、il:m.totzeckzeiss.de&All books published by Wiley-VCH are carefully pro-duced.Nevertheless,authors,editors,and publisherdo not warrant the information contained in thesebooks,including this book,to be free of errors.Read-ers are advised to keep in mind that statements,data,illustrations,procedural d
5、etails or other items mayinadvertently be inaccurate.Library of Congress Card No.:applied forBritish Library Cataloguing-in-Publication DataA catalogue record for this book is available from theBritish Library.Bibliographic information published byDie Deutsche BibliothekDie Deutsche Bibliothek lists
6、 this publication in theDeutsche Nationalbibliografie;detailed bibliographicdata is available in the Internet at.?2005 WILEY-VCH Verlag GmbH&Co.KGaA,WeinheimAll rights reserved(including those of translation intoother languages).No part of this book may be repro-duced in any form nor transmitted or
7、translated intomachine language without written permission fromthe publishers.Registered names,trademarks,etc.used in this book,even when not specifically markedas such,are not to be considered unprotected by law.Printed in the Federal Republic of Germany.Printed on acid-free paper.Cover Design4t Ma
8、tthes+Traut WerbeagenturGmbH,DarmstadtTypesettingK?hn&Weyh,Satz und Medien,FreiburgPrintingDruckhaus Darmstadt GmbH,DarmstadtBookbindingLitges&Dopf Buchbinderei GmbH,DarmstadtISBN3-527-40378-7(Vol.2)ISBN3-527-40382-5(Set)Wolfgang SingerWolfgang Singer was born in 1964 and studied Phy-sics at the Uni
9、versity of Erlangen.He received hisPh.D.at the Institute of Applied Optics in 1995 witha thesis on microoptics,propagation theory andtomography.He spent his post doctorate at the Insti-tute de Microtechnique in Neuchatel,where he devel-oped diffractive diffusors for DUV illumination sys-tems.From 19
10、96 to 1998,he was assistant at theInstitute of Applied Optics at the University of Stutt-gart.Since 1998,he has been with Carl Zeiss SMTAG,working in the department of optical design andsimulation for lithographic optics.His work includestolerancing of objectives and the design of illumina-tion syst
11、ems of EUV systems.He became principalscientist and was engaged at the scientific trainingprogramme at Carl Zeiss.His special interests areimaging theory and partial coherence,and he haswritten his own simulation software.He holds 50patents and has published about 30 papers and con-tributions to tex
12、tbooks.Michael TotzeckMichael Totzeck was born in 1961.He received hisdiploma degree in Physics in 1987 and his Ph.D.in1989,both from the Technical University of Berlin,where he also did his habilitation in 1995.In 1991 hewas awarded the Carl-Ramsauer-Award of the AEGAG for his Ph.D.thesis on near f
13、ield diffraction.From 1995 to 2002,he headed a group on high reso-lution microscopy at the Institute of Applied Opticsin Stuttgart,working by experimental,theoretical andnumerical means on optical metrology at the resolu-tion limit.He has been with the Carl Zeiss SMT AGsince 2002,working in the depa
14、rtment for opticaldesign.His current research topic is electromagneticimaging with high-NA optical systems.He has pub-lished 40 papers on diffraction theory,near-fieldoptics,high-resolution microscopy,interferometry,metrology,optical singularities,polarization-opticsand physics education.Herbert Gro
15、ssHerbert Gross was born in 1955.He studied Physicsat the University of Stuttgart and joined Carl Zeiss in1982.Since then he has been working in the depart-ment of optical design.His special areas of interestare the development of simulation methods,opticaldesign software and algorithms,the modellin
16、g oflaser systems and simulation of problems in physicaloptics,and the tolerancing and the measurement ofoptical systems.Since 1995,he has been heading thecentral optical design department at Zeiss.He servedas a lecturer at the University of Applied Sciences atAalen and at the University of Lausanne
17、,and gaveseminars for the Photonics Net of Baden W?rttem-berg as well as several company internal courses.In1995,he received his PhD at the University of Stutt-gart on a work on the modelling of laser beam propa-gation in the partial coherent region.He has pub-lished several papers and has given man
18、y talks at con-ferences.1Introduction12Paraxial Imaging53Interfaces614Materials1115Raytracing1736Radiometry2297Light Sources2698Sensor Technology and Signal Processing3239Theory of Color Vision37910Optical Systems42511Aberrations48512Wave Optics52313Plano-optical Components56914Gratings64715Special
19、Components69316Optical Measurement and Testing Techniques759VIIContents of Volume IIntroductionXIX17The Wave Equation117.1Introduction217.2From Maxwell to Helmholtz217.2.1Maxwells Equations and the Inhomogeneous Wave Equation217.2.2Wave Equation in Homogeneous Media and the Scalar WaveEquation417.2.
20、3The Dispersion Relation of the Harmonic Wave Solution617.3Elementary Waves in Free Space917.3.1The Electromagnetic Plane Wave917.3.2Spherical Wave1117.3.3Dipole Wave1117.3.4Radiated Field of a Harmonic Current Distribution1317.3.5A Note on Plane and Spherical Waves1317.4Energy,Irradiance and Intens
21、ity1417.5The Angular Spectrum1717.5.1Spatial Frequency Representation1717.5.2Transformation of the Three-dimensional Spectrum into TwoDimensions1917.5.3Free-space Propagation of Transverse Fields2017.5.4Periodic Fields with Discrete Spectra2217.5.5Boundary Conditions and the Spatial Frequency Spectr
22、um2317.5.6Vector Field Representation by Spatial Frequencies2417.6Evanescent Waves2617.7Approximative Solutions to the Wave Equation2817.7.1Geometrical Optics and the Eikonal Equation2817.7.2Paraxial Wave Equation2917.7.3Transport of Intensity3017.7.4Gaussian Beams3117.7.5Ray Equivalent of Gaussian
23、Beams3617.7.6Gaussian Beams in Two Dimensions3717.8Literature39IXContents18Scalar Diffraction4118.1Introduction4218.2Kirchhoff Diffraction Integral4418.2.1Inconsistency of the Kirchhoff Diffraction Integral4818.31stand 2ndRayleighSommerfeld Diffraction Integral4818.4Two-dimensional Diffraction5018.5
24、Huygens Principle5218.6Fourier Space Formulation5418.7Examples of Scalar Diffraction Patterns5718.7.1Diffraction Fields Behind Slits5718.7.2Diffraction by a Rectangular Aperture5918.8Fresnel Diffraction6018.8.1Computation6118.8.2Validity6218.9Collins Fresnel Diffraction Integral6418.9.1Definition641
25、8.9.2Example6718.10Fraunhofer Diffraction6918.11Grating Diffraction7118.11.1Ronchi Grating7118.11.2The Sinusoidal Phase Grating and Surface Fabrication Errors7618.12Scalar Diffraction at Dielectric Objects7918.13Babinets Principle8218.14Scalar Scattering8518.15Boundary Diffraction Waves8918.15.1Geom
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