Edwards爱德华真空泵iXH系列.pdf
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1、M561-00-880Issue 3 OriginalInstruction ManualiXH,iXL,iXS and pXH Dry Pumping SystemsiXH and pXH Dry Pumping SystemsACXXXXXXXXX0 Booster Size Low Voltage High Voltage TMS System 0=Standard 1=T-Variant 2=r Exhaust 0=r 1=Standard without Seals 0=r 1=r 2=Standard Pump Motor 0=None 1=4.5 kW 0=None A=None
2、 1=600G B=600G 3=r check valve.2=r C=r 4=r 2=r 3=1200 D=1200 5=r 3=Standard with 4=1800 E=1800 check valve.5=3000 F=3000 6=4500 G=4500 7=6000 H=6000 Gas Module Dry Pump 0=None(pXH)6=Single Mode+1=r(44 slm flow)Standard Harsh 2=Single Mode 7=Single Mode+(44 slm flow)(96 slm flow)0=None(pXH)A=100 3=Si
3、ngle Mode A=Multi Mode 1=100 B=200 (96 slm flow)(44 slm flow)2=200 C=300 4=r B=Multi Mode 3=300 D=450 5=Single Mode(96 slm flow)4=r (204 slm flow)5=r 6=r 7=rWhere r=reserved for future use 2=7.5 kW 3=11 kW Booster Motor 0=None 1=1.9 kW 2=4.5 kW 3=7.5 kW 4=r Special Features 0=None 1=Customer Specifi
4、ciXL and iXS Dry Pumping SystemsASXXXXXXXX00 Booster Size Low Voltage High Voltage TMS System 0=Standard 1=r Exhaust 0=r 1=Standard without Seals Pump Motor 0=None A=None 0=r 0=None 1=r 2=Standard 1=4.5 kW 1=r B=r check valve.2=r C=r 2=r 3=1200 D=1200 3=Standard with 4=1800 E=1800 check valve.5=3000
5、 F=3000 Gas Module 0=None Dry Pump 1=Loadlock(4 slm)2=Single mode(44 slm flow)0=None 3=r 1=r 4=r 2=160 5=Single mode(204 slm)3=r 4=r 5=500Where r=reserved for future use 2=7.5 kW 3=11 kW Booster Motor 0=None 1=r 2=4.5 kW 3=7.5 kW 4=r We,Edwards,ManorRoyal,Crawley,WestSussexRH109LW,UKdeclareunderours
6、oleresponsibilitythattheproduct(s):DeclarationofConformity towhichthisdeclarationrelatesisinconformitywiththefollowingstandard(s)orothernormativedocument(s):EN10122:1997CompressorandVacuumPumpsSafetyRequirements;Part2VacuumPumps.EN610101:2001SafetyRequirementsforElectricalEquipmentforMeasurement,Con
7、trolandLaboratoryUse;Part1GeneralRequirements.EN613261:2006Electricalequipmentformeasurement,controlandlaboratoryuseEMCrequirements(IndustrialLocationImmunityClassAEmissions)ndANSI/UL610101andCAN/CSAC22.2No.610101,2EditionJuly12,2004,includingrevisionLowVoltSystemsHighVoltSystems(200230V)(380460V)iX
8、H100AC0102y21000ACA102y21000iXH200HAC0B02y22000ACAB02y22000iXH610AC1102y21100ACB102y21100iXH1210AC3102y21200ACD102y21200iXH1210HAC3A06y22200ACDA06y22200iXH1220HAC3B07y22200ACDB07y22200iXH1220HTAC3B1By22200ACDB1By22200iXH1820AC4202y22200ACE202y22200iXH1820HAC4B07y22200ACEB07y22200iXH1820TAC4213y22200
9、ACE213y22200Wherey=1meansnocheckvalveandy=3meanscheckvalvesuppliedJuly22,2005SafetyRequirementsforElectricalEquipmentforMeasurement,ControlandLaboratoryUse,Part1:GeneralRequirementsSEMIS20706Environmental,Health,andSafetyGuidelineforSemiconductorManufacturingEquipmentwheninstalledinaccordancewiththe
10、instructionmanualsuppliedwiththepump,followingtheprovisionsof:2006/95/ECLowVoltageDirective.2004/108/ECElectromagneticCompatibilityDirective.98/37/ECMachinerySafetyDirective.ThisproducthasbeenmanufacturedunderaqualitysystemregisteredtoISO9001P200-02-320 I ssue B 23/10/08ShorehamDrS.E.Ormrod,ChiefTec
11、hnicalOfficer DateandPlace DeclarationofConformityWe,Edwards,ManorRoyal,Crawley,WestSussexRH109LW,UKdeclareunderoursoleresponsibilitythatthemachine(s)LowVoltSystemsHighVoltSystems(200230V)(380460V)iXH3030AC5302y22300ACF302y22300iXH3030TAC5313y22300ACF313y22300iXH3045HACFD07y23310iXH4545HTACGD17y2330
12、0iXH6045HACHD07y23300iXH6045HTACHD17y23300iXH450HACAD0 xy23000pXH4500ACG000120300pXH6000ACH000120300Wherex=5orx=7dependingongasmoduletypeWherey=1meansnocheckvalveandy=3meanscheckvalvesuppliedtowhichthisdeclarationrelatesisinconformitywiththefollowingstandard(s)orothernormativedocument(s)EN10122:1997
13、EN610101:2001EN613261:2006ANSI/UL610101andCAN/CSAC22.2No.610101,2ndEditionJuly12,2004,includingrevisionJuly22,2005SafetyRequirementsforElectricalEquipmentforMeasurement,ControlandLaboratoryUse,Part1:GeneralRequirementsCompressorandVacuumPumpsSafetyRequirements.Part2VacuumPumpsSafetyRequirementsforEl
14、ectricalEquipmentforMeasurement,ControlandLaboratoryUse.Part1GeneralRequirements.Electricalequipmentformeasurement,controlandlaboratoryuseEMCrequirements(IndustrialLocationImmunityClassAEmissions)followingtheprovisionsof2006/95/ECLowVoltageDirective2004/108/ECElectromagneticCompatibilityDirective98/
15、37/ECMachinerySafetyDirectiveP20002720 Issue C 23/10/08Shoreham DateandPlaceDrS.E.Ormrod,ChiefTechnicalOfficer ThisproducthasbeenmanufacturedunderaqualitysystemregisteredtoISO9001 DeclarationofConformity We,Edwards,ManorRoyal,Crawley,WestSussexRH109LW,UKdeclareunderoursoleresponsibilitythatthemachin
16、e(s)LowVoltSystemsHighVoltSystems(200230V)(380460V)iXS160AS0201y22000ASA201y22000iXS1216AS3201y22200ASD201y22200iXS1816AS4201y22300ASE201y22300iXL500ASA501y23000iXL500QASE501y23300iXL500RASF501y23300Wherey=1meansnocheckvalveandy=3meanscheckvalvesuppliedtowhichthisdeclarationrelatesisinconformitywith
17、thefollowingstandard(s)orothernormativedocument(s)EN10122:1997EN610101:2001EN613261:2006 CompressorandVacuumPumpsSafetyRequirements.Part2VacuumPumpsSafetyRequirementsforElectricalEquipmentforMeasurement,ControlandLaboratoryUse.Part1GeneralRequirements.Electricalequipmentformeasurement,controlandlabo
18、ratoryuseEMCrequirements(IndustrialLocationImmunityClassAEmissions)followingtheprovisionsof2006/95/ECLowVoltageDirective2004/108/ECElectromagneticCompatibilityDirective98/37/ECMachinerySafetyDirective 23/10/2008ShorehamDateandPlaceDrS.E.Ormrod,ChiefTechnicalOfficer Thisproducthasbeenmanufacturedunde
19、raqualitysystemregisteredtoISO9001P20002940 Issue A This page intentionally blank.M561-00-880 Issue 3ContentsContentsSection11.11.21.31.41.5PageIntroduction.1Scope and definitions.1Applications.2Description.2Priority of control.2Active Utility Control.322.12.22.32.42.52.62.7Technical data.7General t
20、echnical data.7Performance data.9Loading data.10Nitrogen purge data.11Electrical data.14Cooling-water data.18T variants.1933.13.23.33.43.53.5.13.5.23.63.73.83.93.103.113.123.13Installation.21Locate the dry pumping system.22Lubrication.23Connect the dry pumping system to your vacuum/exhaust system.23
21、Connect to your factory extraction system(optional).24Connect the nitrogen supply.25Flammable/pyrophoric materials.25Gas purges.26Leak-test the system.26Electrical supply.26Connect an additional RF earth(ground)(optional).31Connect to your emergency stop circuit.31Connect the cooling-water hoses.31A
22、ccessories.32Commission the system.32Install additional safety equipment.3344.14.1.14.1.24.1.34.24.34.3.14.3.24.3.34.44.54.64.74.8dcs/8151/09/08Operation.35Start-up.35MicroTIM operation.36PDT operation.36Front panel control operation.36Status indicators.36Manual shut-down.37MicroTIM operation.37PDT
23、operation.37Front panel control operation.37Automatic shut-down.38Unplanned shutdown and alarms.38Emergency stop.39Restart the pump after an emergency stop or automatic shut-down.39Advanced control and monitoring.39 Edwards Limited 2008.All rights reserved.Edwards and the Edwards logo are trademarks
24、 of Edwards Limited.Page iM561-00-880 Issue 3Contents55.15.25.35.45.55.65.75.8Maintenance.41Safety and maintenance frequency.41Relocate the system for maintenance.42Draining the cooling water.43Cleaning the pump.44General maintenance.44Inspect the connections,pipelines,cables and fittings.44Gas modu
25、le configuration.45System operating temperature configuration.4566.16.26.3Transportation,storage and disposal.47Transportation.47Storage.47Disposal.4777.17.27.3Service,spares and accessories.49Introduction.49Service.49Ordering accessories.49Appendix A1Pump display terminal.51A1.1A1.1.1A1.1.2A1.1.3A1
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